INTERNATIONAL PATENT: INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES, 中国科学院半导体研究所 FILES APPLICATION FOR "HOLOGRAPHIC PHOTOLITHOGRAPHY DEVICE BASED ON SEMICONDUCTOR LASER AND HOLOGRAPHIC PHOTOLITHOGRAPHY METHOD"

GENEVA, Sept. 19 -- INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES (No. 35A, Qinghua Dong LuHaidian District, Beijing 100083), 中国科学院半导体研究所 (中国北京市海淀区清华东路甲35号) filed a patent application (PCT/CN2024/081367) for "HOLOGRAPHIC PHOTOLITHOGRAPHY DEVICE BASED ON SEMICONDUCTOR LASER, AND HOLOGRAPHIC PHOTOLITHOGRAPHY METHOD" on Mar 13, 2024. With publication no. WO/2025/189381, the details related to the patent application was published on Sep 18, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is m...