GENEVA, July 28 -- CHANGCHUN INSTITUTE OF OPTICS, FINE MECHANICS AND PHYSICS (CIOMP) , CHINESE ACADEMY OF SCIENCES (CAS) (Dong_Nanhu Road 3888Changchun, Jilin 130033), 中国科学院长春光学精密机械与物理研究所 (中国吉林省长春市东南湖大路3888号) filed a patent application (PCT/CN2024/097005) for "PREPARATION METHOD AND PROCESSING DEVICE FOR EXTREME ULTRAVIOLET LIGHT SOURCE COLLECTOR MIRROR" on Jun 03, 2024. With publication no. WO/2025/152330, the details related to the patent application was published on Jul 24, 2025.
Notably, the patent applicatio...