GENEVA, Dec. 22 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Strasse 273447 Oberkochen) filed a patent application (PCT/EP2025/065418) for "GAS PRESSURE MEASURING DEVICE FOR MEASURING A PRESSURE OF A PROCESS GAS AT A WORKING SITE OF AN APPARATUS FOR PARTICLE BEAM-INDUCED PROCESSING" on Jun 04, 2025. With publication no. WO/2025/256975, the details related to the patent application was published on Dec 18, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BUDACH, Michael (Industriestrasse 164380 Rossdorf)
Abstract: Gas pressure measuring device (100) for measuring a pressure (P, P1) of a process gas (3...