GENEVA, Dec. 29 -- CARL ZEISS SMT GMBH (Rudolf-Eber-Str. 273447 Oberkochen) filed a patent application (PCT/EP2025/065517) for "3D INSPECTION OF BURIED REGIONS OF INTEREST WITH REDUCED MILLING ARTEFACTS" on Jun 04, 2025. With publication no. WO/2025/261786, the details related to the patent application was published on Dec 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): KIM, Hyun Hwa (Carl-Zeiss-Strasse 2273447 Oberkochen), MANTHA, Lakshmi Sravani (Rudolf-Eber-StraBe 273447 Oberkochen)
Abstract: A wafer inspection system configured for 3D volume image generation of deeply buried critica...