GENEVA, June 2 -- CANON TOKKI CORPORATION (10-1 Shinko-cho, Mitsuke-shi, Niigata9540076), キヤノントッキ株式会社 (新潟県見附市新幸町１０番１号) filed a patent application (PCT/JP2024/031883) for "VACUUM PUMP SYSTEM, FILM FORMATION APPARATUS, POWER SUPPLY CONTROL METHOD FOR VACUUM PUMP SYSTEM, FILM FORMATION METHOD, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE" on Sep 05, 2024. With publication no. WO/2025/109832, the details related to the patent application was published on May 30, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) syste...