GENEVA, March 9 -- CANON TOKKI CORPORATION (10-1 Shinko-cho, Mitsuke-shi, Niigata9540076), キヤノントッキ株式会社 (新潟県見附市新幸町１０番１号) filed a patent application (PCT/JP2024/024320) for "ELECTROSTATIC CHUCK SYSTEM, FILM FORMATION DEVICE, CLAMPING METHOD, FILM FORMATION METHOD, AND ELECTRONIC DEVICE PRODUCTION METHOD" on Jul 04, 2024. With publication no. WO/2025/047119, the details related to the patent application was published on Mar 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Int...