INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "CLEANING METHOD FOR PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE"

GENEVA, Feb. 3 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (No.8 Wenchang Avenue, Beijing Economic-Technological Development AreaDaxing District, Beijing 100176), 北京北方华创微电子装备有限公司 (中国北京市大兴区北京经济技术开发区文昌大道8号) filed a patent application (PCT/CN2024/106366) for "CLEANING METHOD FOR PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE" on Jul 19, 2024. With publication no. WO/2025/021019, the details related to the patent application was published on Jan 30, 2025.

Notably, the patent ap...