INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "VARIABLE VENT PRESSURE AND FLOW FOR FLUSHING LOADLOCK CHAMBER"

GENEVA, Sept. 10 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/018024) for "VARIABLE VENT PRESSURE AND FLOW FOR FLUSHING LOADLOCK CHAMBER" on Feb 28, 2025. With publication no. WO/2025/184636, the details related to the patent application was published on Sep 04, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAGGETT, John (7 Lakeshore DriveAmesbury, Massachusetts 01913), SZETO, Vincent (65 Cragmore RoadNewton, Massachusetts 02464)

Abstract: A workpiece processing system has a process chamber for processing a work...