INTERNATIONAL PATENT: ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIVERSITY OF ARIZONA FILES APPLICATION FOR "TRANSMISSION-BASED EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY"

GENEVA, Oct. 20 -- ARIZONA BOARD OF REGENTS ON BEHALF OF THE UNIVERSITY OF ARIZONA (The University of ArizonaTech Launch Arizona, 1600 E. Idea Lane, Suite 110Tucson, AZ 85713) filed a patent application (PCT/US2025/024414) for "TRANSMISSION-BASED EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY" on Apr 11, 2025. With publication no. WO/2025/217609, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ELKABBASH, Mohamed (The University of Arizona1630 E. University Blvd.P.O. Box 210094Tucson, AZ 85721)

Abstract: A device for transmissive e...