Japan, Jan. 28 -- V TECHNOLOGY CO LTD has got intellectual property rights for 'MANUFACTURING METHOD FOR REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK, AND FOCUSED ION BEAM PROCESSING APPARATUS.' Other related details are as follows:

Application Number: JP,2022-070974

Category (FI): G03F1/24,G03F1/84

Stage: Grant (IP right document published.)

Filing Date: April 22, 2022

Publication Date: Nov. 2, 2023

The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100

Disclaimer: Curated by HT Syndication....