Japan, Jan. 28 -- V TECHNOLOGY CO LTD has got intellectual property rights for 'MANUFACTURING METHOD FOR REFLECTIVE MASK BLANK, REFLECTIVE MASK BLANK, AND FOCUSED ION BEAM PROCESSING APPARATUS.' Other related details are as follows:
Application Number: JP,2022-070974
Category (FI): G03F1/24,G03F1/84
Stage: Grant (IP right document published.)
Filing Date: April 22, 2022
Publication Date: Nov. 2, 2023
The original document can be viewed at: https://www.j-platpat.inpit.go.jp/p0100
Disclaimer: Curated by HT Syndication....